# Semiconductor Lot Hold and Release Form Template

> Source: https://netray.co/tools/semiconductor-lot-hold-and-release-form-template
> Publisher: Netray (netray.co), AI and integration engineering for ERP and manufacturing systems.
> Section: Free Tools

## Short answer

A fill-in lot hold and release record for wafer fabs and assembly and test houses, covering hold reason, affected wafers, disposition and sign-off.

## Category

quality

## Industry

Semiconductors

## Audience

- Fab process engineer
- Yield engineer
- Quality engineer
- OSAT production supervisor

## Tool

**Kind:** template

**Output:** document

**Fields:**

#### Site / fab

**Key:** site

**Type:** text

**Default:** Fab 2, Bay 4

#### Lot ID

**Key:** lot_id

**Type:** text

**Default:** A24Q1187.1

#### Product / device

**Key:** product

**Type:** text

**Default:** PMIC-180-R2

#### Route step at hold

**Key:** route_step

**Type:** text

**Default:** M2 ETCH-INSPECT (step 2410)

#### Wafers in lot

**Key:** wafer_count

**Type:** number

**Default:** 25

#### Wafer slots affected

**Key:** wafers_affected

**Type:** text

**Default:** Slots 3, 4, 11-14

#### Hold date

**Key:** hold_date

**Type:** date

**Default:** 2026-10-19

#### Hold type

**Key:** hold_type

**Type:** select

**Options:**

- Engineering hold
- Equipment hold
- Metrology out of spec
- Customer hold
- Contamination suspect
- Documentation hold

**Default:** Metrology out of spec

#### Reason for hold

**Key:** hold_reason

**Type:** textarea

**Default:** Post-etch CD measured 0.21 um on slots 3, 4 and 11-14 against a 0.18 um +/- 0.015 um target. Remaining wafers within limits.

#### Proposed disposition

**Key:** disposition

**Type:** select

**Options:**

- Release as is
- Rework
- Split and release good wafers
- Scrap affected wafers
- Send for failure analysis
- Customer concession

**Default:** Split and release good wafers

#### Release authority

**Key:** release_by

**Type:** text

**Default:** Process engineering manager

**Blocks:**

#### Lot Hold Record

**Body:** Site: {{site}}
Lot ID: {{lot_id}}
Product: {{product}}
Route step at hold: {{route_step}}
Hold date: {{hold_date}}
Hold type: {{hold_type}}

#### Scope of Hold

**Body:** Wafers in lot: {{wafer_count}}
Wafer slots affected: {{wafers_affected}}

Reason for hold: see detail below.

#### Hold Reason Detail

**Body:** {{hold_reason}}

#### Containment Check

**Table:**

**Columns:**

- Check
- Done (Y/N)
- Initials
- Notes

**Rows:**

**0:** Lot status set to HOLD in MES

**0:** Sister lots on same tool and time window identified

**0:** Tool or chamber placed on engineering hold if suspect

**0:** Metrology data attached

**0:** Physical lot location confirmed (FOUP, stocker slot)

#### Proposed Disposition

**Body:** Disposition: {{disposition}}
Release authority: {{release_by}}

Conditions for release (rework recipe, re-measure plan, split instructions):
______________________________________________

#### Release Authorization

**Signatures:**

- Process engineer
- Yield engineer
- Quality engineer
- Release authority

**Notes:** Hold codes, reason codes and release authority levels differ by site, so align the select lists with your MES hold-code table. This is a starting point, not a substitute for your quality system procedure.

## Content

**Intro:** A lot hold form is the paper trail behind every MES hold in a fab or assembly house. This template captures the lot, route step, affected wafers, reason, containment and the signed release so the lot can move again with evidence.

**Sections:**

#### How to use the template

**Body:** Fill in the lot ID, product and route step exactly as they appear in the MES. Choose a hold type, describe the observation with the measured value and the specification, and list the wafer slots affected rather than writing the whole lot. Pick a proposed disposition, then export to PDF, Word or Excel and attach it to the lot history. The containment table is meant to be completed by hand on the shop floor so that sister lots and suspect tools are checked before anyone argues about the disposition.

**Bullets:**

- Quote measured value and spec limit in the reason
- List wafer slots, not just the lot
- Record who released and when
- Attach metrology or inspection data to the lot history

#### Why holds need a disposition record

**Body:** A hold in the MES stops the lot but does not explain why. Auditors for IATF 16949 automotive customers and for ISO 9001 expect traceable disposition of nonconforming product, including who authorized release and on what evidence. Split-and-release decisions are the most scrutinized, because good wafers leave the lot under a different identity. Writing the conditions for release down, such as a rework recipe or re-measure plan, prevents the common situation where the lot is released verbally and nobody can reconstruct the logic six months later during a customer complaint.

#### Containment before disposition

**Body:** Most expensive fab escapes come from not looking sideways. When one lot is out on a metrology step, ask which other lots ran on the same tool, chamber, recipe and time window. The containment table prompts this. If a chamber is suspect, put it on engineering hold in the equipment system as well so that production lots are not loaded while the lot hold is being argued. Record the sister lots you checked, even if all were clean, because the negative result is part of the evidence.

#### Common mistakes

**Body:** Hold forms fail in predictable ways. Reasons are written as 'bad CD' without numbers. Releases are signed by the same engineer who raised the hold. Rework is approved without checking the rework count limit for the layer, since many photolithography and etch steps allow only one or two reworks. Customer-specific hold requirements get missed because the hold type was set to generic engineering hold. Use the hold type list to force a choice, and keep one form per lot so the history stays clean.

**Cta:** If your hold and disposition data lives in an MES or ERP and you want it summarized or queried in plain language on your own servers, Netray can build that as a private deployment.

**Faq:**

#### Is this form a replacement for the MES hold record?

**Answer:** No. The MES hold stops the lot and carries the system status. This form is the supporting record that explains the reason, the containment performed and the signed release, and it is usually attached to the lot history or quality system.

#### Who should be allowed to release a lot?

**Answer:** That is set by your quality system. Many sites separate the person raising the hold from the release authority, and require quality approval for customer-affected or scrap-related dispositions. Edit the signature lines to match your own procedure.

#### Can I use it in an OSAT or test house?

**Answer:** Yes. Replace the route step with the assembly or test operation, for example die attach, wire bond or final test, and list units or strips affected instead of wafer slots. The structure of hold, containment and release is the same.

#### How do I keep one form per lot when many lots are held together?

**Answer:** Fill in the template once per lot and keep a common reference in the reason field, such as a tool alarm number. Export each as its own document so that each lot history is complete and individually auditable.

## Search terms

lot hold form semiconductor, wafer lot hold release template, fab lot disposition form, MES lot hold record, semiconductor nonconforming lot template, wafer lot release authorization form, fab hold lot checklist, OSAT lot hold form

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