# Wafer Fab Process Traveler Template

> Source: https://netray.co/tools/wafer-fab-process-traveler-template
> Publisher: Netray (netray.co), AI and integration engineering for ERP and manufacturing systems.
> Section: Free Tools

## Short answer

A fill-in lot traveler for wafer processing with operation table, hold points, deviations and sign offs.

## Category

mes-shop-floor

## Industry

Semiconductors

## Audience

- Process engineer
- Fab operator
- Pilot line engineer
- R&D engineer

## Tool

**Kind:** template

**Output:** document

**Fields:**

#### Company or lab

**Key:** company

**Type:** text

**Default:** Example Microdevices

#### Lot ID

**Key:** lot_id

**Type:** text

**Default:** LOT-24-0187

#### Product / device

**Key:** product

**Type:** text

**Default:** MEMS pressure sensor rev B

#### Route name and revision

**Key:** route

**Type:** text

**Default:** MEMS-P-ROUTE rev 07

#### Wafer count

**Key:** wafer_count

**Type:** number

**Default:** 25

#### Wafer size

**Key:** wafer_size

**Type:** select

**Options:**

- 100 mm
- 150 mm
- 200 mm
- 300 mm

**Default:** 200 mm

#### Priority

**Key:** priority

**Type:** select

**Options:**

- Normal
- Hot lot
- Super hot lot
- Engineering

**Default:** Normal

#### Start date

**Key:** start_date

**Type:** date

**Default:** 2026-10-20

#### Lot owner

**Key:** owner

**Type:** text

**Default:** A. Process Engineer

#### Special instructions

**Key:** notes_text

**Type:** textarea

**Default:** Measure oxide thickness on 3 wafers after step 20. Hold for engineer release after poly etch.

**Blocks:**

#### Wafer Process Traveler

**Body:** Company: {{company}}
Lot ID: {{lot_id}}
Product: {{product}}
Route: {{route}}
Wafers: {{wafer_count}} x {{wafer_size}}
Priority: {{priority}}
Start date: {{start_date}}
Lot owner: {{owner}}

#### Special instructions

**Body:** {{notes_text}}

#### Operation record

**Table:**

**Columns:**

- Op
- Step
- Tool
- Recipe
- Spec / target
- In
- Out
- Operator
- Date

**Rows:**

**0:** 10

**1:** Incoming inspection

**5:** {{wafer_count}}

**0:** 20

**1:** Pre clean

**0:** 30

**1:** Thermal oxidation

**0:** 40

**1:** Thickness measure

**0:** 50

**1:** Photo coat and expose

**0:** 60

**1:** Develop and inspect

**0:** 70

**1:** Etch

**0:** 80

**1:** Strip and clean

#### Hold points and measurements

**Table:**

**Columns:**

- After op
- Measurement / check
- Result
- Pass / fail
- Released by

**Rows:**

**0:** 40

**0:** 60

**0:** 80

#### Deviations and scrap

**Table:**

**Columns:**

- Op
- Wafer #
- Issue
- Action
- Initials

**Rows:**

#### Approvals

**Signatures:**

- Lot owner
- Process engineer
- Quality

**Notes:** A generic starting point. Replace the operation list with your actual route, recipe names and specs. In most fabs the MES holds the authoritative route and this printed traveler is for pilot lines, labs and engineering lots.

## Content

**Intro:** A process traveler follows a lot through every step of the flow and records who ran what, when, and what came out. This template gives pilot lines, university fabs and engineering lots a clean printable run sheet.

**Sections:**

#### How to use the template

**Body:** Fill in the lot, product, route and wafer count at the top. Add special instructions such as measure points or engineering holds. Edit the operation table to match your route: one row per step with tool, recipe, spec, wafers in and out, operator and date. Export to PDF, Word or Excel, print it and keep it with the cassette or FOUP. Production fabs normally use an MES for this. A paper or document traveler still fits pilot lines, R&D and when the system is down.

#### What a good traveler records

**Body:** The traveler should identify the lot and route revision, so nobody runs an obsolete flow. Each operation carries a tool, recipe and target so a reviewer can see the intent. Wafers in and out catch silent losses. Hold points force a measurement and release before the next critical step. A deviation block ties scrap and rework to a wafer number. Together these give traceability for yield analysis and for customer or audit questions.

**Bullets:**

- Lot, product and route revision
- Tool, recipe and target per step
- Wafers in and out for each operation
- Hold points with release signature
- Deviation and scrap log by wafer

#### Common mistakes and ERP notes

**Body:** Typical problems are an outdated route revision, missing wafer counts after a scrap, recipes written from memory and holds released without data. If the lot also lives in an ERP or an MES, keep the lot ID identical in both and do not create a second numbering scheme. In ERP terms the route is the routing, each step is an operation with a work center, and wafers in and out feed yield or scrap reporting. Reconcile the printed traveler against the system at lot completion.

**Cta:** Netray can read routes and lot history from your ERP or MES and generate travelers or lot history summaries on demand, running on your own infrastructure.

**Faq:**

#### Is this the same as an MES route?

**Answer:** No. An MES route is system controlled and enforces step order and tool eligibility. This traveler is a document you print or export. It suits pilot lines, labs and backup use, not high volume production.

#### Can I add more operations?

**Answer:** Yes, export to Excel or Word and extend the operation table to match your route. A typical front end flow has hundreds of steps, so many teams use a section per module such as isolation, gate, metal.

#### What is a hold point?

**Answer:** A hold point is a step where the lot waits until a measurement or review passes and an authorized person releases it. They protect expensive downstream steps from running on out of spec wafers.

#### How should deviations be recorded?

**Answer:** Record the operation, the wafer slot numbers affected, the issue, the action taken and who approved it. If a wafer is scrapped, update the wafer count on all later operations.

## Search terms

semiconductor process traveler template, wafer lot traveler, fab run sheet template, process flow traveler, lot traveler template, semiconductor route card, pilot line traveler, wafer process flow template

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