Wafer Fab Process Traveler Template
A process traveler follows a lot through every step of the flow and records who ran what, when, and what came out. This template gives pilot lines, university fabs and engineering lots a clean printable run sheet.
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Wafer Fab Process Traveler Template
Wafer Process Traveler
Company: Example Microdevices Lot ID: LOT-24-0187 Product: MEMS pressure sensor rev B Route: MEMS-P-ROUTE rev 07 Wafers: 25 x 200 mm Priority: Normal Start date: 2026-10-20 Lot owner: A. Process Engineer
Special instructions
Measure oxide thickness on 3 wafers after step 20. Hold for engineer release after poly etch.
Operation record
| Op | Step | Tool | Recipe | Spec / target | In | Out | Operator | Date |
|---|---|---|---|---|---|---|---|---|
| 10 | Incoming inspection | 25 | ||||||
| 20 | Pre clean | |||||||
| 30 | Thermal oxidation | |||||||
| 40 | Thickness measure | |||||||
| 50 | Photo coat and expose | |||||||
| 60 | Develop and inspect | |||||||
| 70 | Etch | |||||||
| 80 | Strip and clean |
Hold points and measurements
| After op | Measurement / check | Result | Pass / fail | Released by |
|---|---|---|---|---|
| 40 | ||||
| 60 | ||||
| 80 |
Deviations and scrap
| Op | Wafer # | Issue | Action | Initials |
|---|---|---|---|---|
Approvals
A generic starting point. Replace the operation list with your actual route, recipe names and specs. In most fabs the MES holds the authoritative route and this printed traveler is for pilot lines, labs and engineering lots.
Traveler from ERP routing
Want travelers generated from your ERP or MES route data? Ask for an optional expert review.
Optional. The tool and every export work without this. No spam.
How to use the template
Fill in the lot, product, route and wafer count at the top. Add special instructions such as measure points or engineering holds. Edit the operation table to match your route: one row per step with tool, recipe, spec, wafers in and out, operator and date. Export to PDF, Word or Excel, print it and keep it with the cassette or FOUP. Production fabs normally use an MES for this. A paper or document traveler still fits pilot lines, R&D and when the system is down.
What a good traveler records
The traveler should identify the lot and route revision, so nobody runs an obsolete flow. Each operation carries a tool, recipe and target so a reviewer can see the intent. Wafers in and out catch silent losses. Hold points force a measurement and release before the next critical step. A deviation block ties scrap and rework to a wafer number. Together these give traceability for yield analysis and for customer or audit questions.
- Lot, product and route revision
- Tool, recipe and target per step
- Wafers in and out for each operation
- Hold points with release signature
- Deviation and scrap log by wafer
Common mistakes and ERP notes
Typical problems are an outdated route revision, missing wafer counts after a scrap, recipes written from memory and holds released without data. If the lot also lives in an ERP or an MES, keep the lot ID identical in both and do not create a second numbering scheme. In ERP terms the route is the routing, each step is an operation with a work center, and wafers in and out feed yield or scrap reporting. Reconcile the printed traveler against the system at lot completion.
Frequently Asked Questions
Is this the same as an MES route?
No. An MES route is system controlled and enforces step order and tool eligibility. This traveler is a document you print or export. It suits pilot lines, labs and backup use, not high volume production.
Can I add more operations?
Yes, export to Excel or Word and extend the operation table to match your route. A typical front end flow has hundreds of steps, so many teams use a section per module such as isolation, gate, metal.
What is a hold point?
A hold point is a step where the lot waits until a measurement or review passes and an authorized person releases it. They protect expensive downstream steps from running on out of spec wafers.
How should deviations be recorded?
Record the operation, the wafer slot numbers affected, the issue, the action taken and who approved it. If a wafer is scrapped, update the wafer count on all later operations.
Netray can read routes and lot history from your ERP or MES and generate travelers or lot history summaries on demand, running on your own infrastructure.
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