Quality & InspectionFree worksheetPDF, Excel, Word exportPhotonics

Cleanroom Particle Count Log Worksheet

Photonics assembly often depends on stable particle counts. This worksheet turns raw counter readings into particles per cubic meter and flags any sample that exceeds the limit you set.

Download:
DateSample locationRoom stateParticles counted (0.5 um and larger)Sample volume (L)Limit (particles/m3)Particles per m3Over limit (1=yes)
7,420
0
3,357
0
120,141
0
212
0
1,413
0
Samples over limit
0
Share of samples over limit
0%

Particles per m3 equals count divided by sample volume in liters, times 1000. Enter the limit that applies to your room class and particle size. The default limits shown are the ISO 14644-1 class limits for 0.5 um particles for ISO 7, ISO 8 and ISO 5 respectively; confirm against your standard and qualification plan.

Link environmental data to lots

Optional review of how monitoring data could be tied to production lots in your ERP.

Optional. The tool and every export work without this. No spam.

How to use the worksheet

For each sample, enter the date, location, room state, total particles counted at the size of interest, the sample volume in liters and the limit for that location. The sheet calculates particles per cubic meter and marks samples over the limit. Export the log to Excel for your monthly environmental monitoring report.

  • Use the same particle size across rows
  • Enter sample volume from the counter, commonly 28.3 L (one cubic foot)
  • Record room state at sampling
  • Investigate every excursion

The calculation

Concentration per cubic meter is the count divided by the sampled volume in liters, multiplied by 1000. For example, 210 particles in 28.3 L is about 7,420 per cubic meter. Compare against the class limit for the particle size, for example 352,000 per cubic meter at 0.5 um for ISO Class 7 as listed in ISO 14644-1.

Handling excursions

When a sample exceeds the limit, repeat the count, review recent activity, check filters and pressure differentials, and record the investigation. Trend data over weeks to catch gradual filter loading before it affects yield. Link excursions to affected work orders in your ERP or MES where product is exposed.

Frequently Asked Questions

What volume should I sample?

Your qualification plan sets this, based on ISO 14644-1 sampling rules and the class limit. Many portable counters sample 28.3 L, equal to one cubic foot, per location.

Can I use it for other particle sizes?

Yes. Enter counts for one size per row and set the limit for that size. Keep sizes consistent within a column or add separate rows with clear labels.

What is room state?

As built means construction complete with no equipment, at rest means equipment installed but no people, and in operation means normal production activity. Limits and sampling plans can differ by state.

Does this replace a monitoring system?

No. It is a simple record for manual sampling. Continuous monitoring systems log automatically, though you may still export their data into a similar sheet for review.

If you want monitoring excursions to flag affected lots automatically, Netray can help connect environmental data to your ERP.

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